- Laser writer
Laser engraving technology
- Scanning distance：0.65mm
- Scanning mode：Raster
- Accuracy： 5nm
- E-Beam writer
Electronic beam engraving technology
- Scanning distance：depending on the beam spot
- Scanning mode：Raster & Vector
- Accuracy：depending on the beam spot (approx. 25nm)
* WUXI CHINA RESOURCES MICROELECTRONICS CO.,LTD MASK FACTORY has developed electronic beam and laser processing technologies and boasts the most advanced UV exposure machine.
